High-Efficiency Millimeter-Wave Substrate Integrated Waveguide Silicon On-Chip Antennas Using Through Silicon Via
In this paper, the through silicon via (TSV) technology is employed to design millimeter-wave substrate integrated waveguide (SIW) based on-chip antennas. The TSV based SIW is first characterized with different silicon resistivity, substrate thickness and via pitch size. Then a high-efficiency TSV based SIW antenna is demonstrated.
Yong-Xin Guo Hui Chu
National University of Singapore, Department of Electrical and Computer Engineering4 Engineering Dri National University of Singapore, Department of Electrical and Computer Engineering 4 Engineering Dr
国际会议
南京
英文
1-4
2010-09-20(万方平台首次上网日期,不代表论文的发表时间)