会议专题

Shear Stress and Deformation Analysis of Static Bonded Multi-layer of Pyrex7740 Glass and Aluminum

In this paper the technological experiments of static bonding has been carried out in the bonding of multi-layer Pyrex7740 Glass and Al. The joining mechanism is analyzed with SEM and EDX. It’s observed that bonding region across the interface consists of the metal layer, oxide transitional layer and the glass layer. The bonding process can mainly be categorized into anodic process and solid state diffusing process. The pile-up of the ions and its drift in the interface area are the main reasons for anode oxidation and joining successfully. The analysis of the shear stress and deformation in the static bonded samples was made by MARC. Modeling studies showed the maximum shear stress of bonded samples all occur in the transition layer. It also shows the shear stress and deformation in the three-layer samples is significantly smaller than that in the two-layer samples. This has an important advantage in MEMS fabrication.

Static bonding Aluminum Pyrex glass Finite element Shear stress

Cuirong Liu Tuosheng Jia Qingsen Meng

Materials Science & Engineering Department, Taiyuan University of Science and Technology ,Taiyuan, 0 Materials Science & Engineering Department, Taiyuan University of Technology , Taiyuan, 030024,China

国际会议

International Symposium on Advanced Rolling Equipment Technologies(第一届轧钢设备新技术国际研讨会 ISARET 2010)

太原

英文

361-364

2010-09-23(万方平台首次上网日期,不代表论文的发表时间)