Innovative metrics for machine performance measurement and their applications in semiconductor manufacturing
Reasonable metrics to measure machine performance are appropriate benchmarks for maintenance. The most popular machine performance metrics Machine Availability (MA) has been found that it is not suitable for all the situations. After Scheduled Downtime was excluded from the analysis,Machine Performance (MP) and Machine Failure (MF) were proposed. A case study demonstrates that the proposed two metrics can reflect the machine performance induced by machine self more accurately than MA. Correlation analysis validates the deduction that the difference between MF and 1-MA is less with the growth of the length of the selected period. MA was not denied in all areas because it can be used in catching the total available time of machine or catching the machine performance of a long time. The results of two applications (machine downtime control and performance measurement of preventative maintenance) show the proposed two metrics can work well to measure the machine performance.
Metrics machine performance measurement machine failure machine availability
Qiang Wang Bo Li
Institute of Astronautics and Aeronautics,University of Electronic Science and Technology of China,ChengDu,China
国际会议
北京
英文
793-797
2009-10-21（万方平台首次上网日期，不代表论文的发表时间）