A Si3N4 TUBE FORMED USING TMAH ETCHING

摘要：

In this paper, micro-tube fabricated from SiO2/Si3N4 strained composite structures using a self-scrolling procedure is presented. This fabrication is a self-organization process using stress of bifilm. This technique is based on self-rolling of a thin highly strained SiO2/ Si3N4 bifilm detached from the substrate by TMAH selective etching. The material of bifilm and the solution for anisotropic etching are in common use, so this method can be widely used in the future.

关键词： Micro-tube TMAH Si3N4 Anisotropic etching

作者: Huijun Chen Dacheng Zhang

作者单位: Institute of Microelectronics ，Peking University ， Beijing, China P.R. 100086

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）