DESIGN AND SIMULATION OF QUARTZ TUNING FORK TEMPERATURE SENSOR
In order to optimize the design of quartz tuning fork temperature sensor, finite element method (FEM) is applied to model optimum tuning fork geometry, tine tip and tine surface electrode shape and thickness with a resonance frequency close to 32 kHz and a series resistance value of 40 kΩ as design targets. This type of sensor designed with a new Zytw-cut is proved that working at flexural vibration mode was better than at the others modes. Precise temperature versus frequency analyses of resonators have been carried out and Least MeanSquared (LMS) curve fit algorithm is applied to compute the temperature values quantitatively. The results obtained from the experimental investigations show the method which synthesizes many factors to design quartz tuning-fork temperature sensor. Using Zytw-cut can bring the temperature coefficient up to 70ppm/(degree C) and make power consumption lower. The temperature sensor based on quartz tuning-fork thermo-sensitive resonator is mounted in a standard holder for use from -30 degree C to 160 degree C with an accuracy of 0.05 degree C and a high resolution of 0.001 degree C. It is proved that it is possible to construct a miniature quartz tuning-fork temperature sensor with high sensitivity and small non-linearity.
quartz tuning forks temperature sensor finite element method simulation
Jun Xu Bo You Xin Li
College of Automation, Harbin University of Science and Technology, Harbin 150080, China Computer Center, Harbin University of Science and Technology, Harbin 150080, China
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）