CHARACTERIZATION OF A MICROPUMP ACTUATED BY TERNARY TiNiCu SHAPE MEMORY THIN FILMS
Thin film SMAs have the potential to became a primary actuating mechanism for micropumps. In this study, a micropump driven by TiNiCu shape memory thin film is designed and fabricated. The micropump is composed of a TiNiCu/Si bimorph driving membrane, a pump chamber and two inlet and outlet check valves. The thickness, surface morphology and phase transformation property of TiNiCu film have been characterized by scanning electron microscope (SEM), atomic force microscopy (AFM), differential scanning calorimeters (DSC). Driving capacity of TiNiCu/Si biomorphic driving membrane has been investigated. The film surface shows a smooth and featureless morphology without any cracks, and the hysteresis width △T of TiNiCu film is about 10 oC. By using the recoverable force of TiNiCu thin film, the actuation diaphragm realizes reciprocating motion effectively. Experimental results show that the micropump driving by TiNiCu film has good performance, such as high working frequency, stable driving capacity, and long fatigue life time.
micropump TiNiCu SMA (shape memory alloys) thin film magnetron sputtering patterning
Huijun Zhang Chengjun Qiu
The Key Lab of Integrated Circuit, Heilongjiang University, Harbin, 150080, P. R. China
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）