AN ORTHOGONAL-BEAM TUNNEL-EFFECT MEMS GYROSCOPE

摘要：

Tunnel-effect MEMS gyroscopes have broad applications in astronautics because they have high sensitivity, low measurement ranges, and small volumes.This paper describes the design of a novel orthogonal-beam gyroscope based on the principle of tunnel effect. The mathematical model of this class of gyroscopes is set up and the associated performance isobtained with ANSYS simulation software. Related MEMS technology for the construction of these orthogonal-beam tunnel-effect gyroscopes is also described.

关键词： Tunnel effect gyroscope MEMS fabrication

作者: Jun Liu Yuanyuan Luo Jingmin Li YunBo Shi Fai Ma

作者单位: National Key Lab for Electronic Measurement and Technology, North University of China; Department of National Key Lab for Electronic Measurement and Technology, North University of China; Department of Department of Mechanical Engineering University of California, Berkeley, CA 94720, USA

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）