SIMULATION AND TEST OF A DOUBLY DECOUPLED LATERAL AXIS GYROSCOPE

摘要：

A novel doubly decoupled bulk micromachined lateral gyroscope, proposed in our former work, can efficiently suppress the undesired mechanical coupling, while remaining symmetric in structure. Both theoretical simulations and experiments are carried out to analyze the decoupling property of this gyroscope. The simulated results show that the driving and sensing mode frequencies are 3.821 kHz and 3.956 kHz, respectively. Furthermore, the displacements of the driving mode and sensing mode are also simulated by ANSYS TM . In driving mode, simulation result shows that the mechanical coupling from the driving mode to sensing mode is 8％. Similarly, in sensing mode, the mechanical coupling from the sensing mode to driving mode is 0.9％. Micro Laser Doppler vibration meter is employed to detect mechanical coupling in the sensing mode. The test result is about 2％, close to the simulated value.

关键词： micromachined lateral gyroscope doubly decoupled simulation.

作者: Xuesong Liu Bo Lv Zhenchuan Yang Haitao Ding Guizhen Yan

作者单位: Institute of Microelectronics, Peking University, Beijing 100871, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）