RESEARCH ON MICRO ACCELEROMETER ARRAY

摘要：

In a physical process, there might be more than one acceleration to be measured ，but a micro accelerometer of a certain testing range can hardly satisfy the measurement requirement. In this paper, a micro accelerometer array with four testing ranges, namely, 0~100g, 0~500g, 0~1,000g and 0~2,000g, is designed and fabricated. In addition to the design and fabrication process, the protection for the array elementson the condition of overload is described in detail. From the static and dynamic measurement results, it is known that the array has linearity smaller than 2.5％, what’s more, it has quite good frequency response characteristics. The experimental results demonstrate that the array can be used for the measurement of a physical process with multi-acceleration.

关键词： micro accelerometer array piezoresistive anti-overload bulk process measurement

作者: Jijun Xiong Haiyang Mao Wendong Zhang Dong Xu Tao Guo

作者单位: Key Laboratory of the Electronic Measurement Technology of the National Defense,North University of China, Taiyuan, 030051, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）