DEVELOPMENT AND APPLICATION OF A PRECISION MICRO EDM SYSTEM
This paper presents the development of a micro-EDM system which is aimed to improve micro machining capability. The system consists of high precision X-Y-Z stages with quick response, a high precision granite machine body, a pulse power generator, a CCD microscopic computer vision system, etc. The X-Y-Z stages are driven by ultrasonic linear motors with a resolution as high as 0.05 μ m. The granite machine body can reduce stray capacitance and absorb vibrations. RC pulse power generator can supply discharging energy as small as 10 -9J. Micro electrode can be measured with a resolution of 1.6 μ m by the microscopic computer vision system online. In order to machine precision 3D microstructures, a special CAM software package based on the commercial CAD/CAM software Unigraphics (UG) is developed to generate tool path and NC codes and compensate the electrode wear. Experiments carried out on this machining system showthat micro shafts with a minimum diameter of 6 μ m and micro holes of 10 μ m in diameter can be obtained stably. With the aid of the self-developed CAM software packages, complicated 3D microstructures are machined on this micro-EDM machining system.
Gang LI Wansheng ZHAO Rui GUO
School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin, China School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）