Penetrating process analysis of AFM diamond tip

摘要：

A mechanical micro-scratching system based on Atomic Force Microscope (AFM) and three-dimensional high precision stage was built up. In the machining process with diamond tip, the process of depth controlling was determined by the relation between the loading movement of the stage and the tip penetration depth. By theoretical analysis of loading process with diamond tip, a mathematical model correlated loading movement and the penetration depth was founded, and the loading efficiency formula of elastic tip was also acquired. Verified by experiments, such equations reflected the indenting process of the system and provided theoretical basis on optimizing the penetration depth control arithmetic.

关键词： AFM three-dimensional scratching penetration depth

作者: Z. J. Hu Y. D. Yan Y. H. Zhang T. Sun S. Dong

作者单位: P. O. Box 413 Harbin Institute of Technology, Harbin, 150001, P. R. China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）