MICRO ABLATION OF OPTICAL FIBERS USING VACUUM ULTRAVIOLET LASER

摘要：

157nm vacuum ultraviolet laser was considered as one of promising tools for next-generation lithography or precision micro-ablation. In this study, a multi-functional micro-ablationsystem with 157 nm vacuum ultraviolet laser was conducted.Some laser ablation experiments were performed for silica glasses and optical fibers. For the silica glasses, the average ablation rate of the 157nm laser could reach to 4 μ m/s. Thematerial removal is one-photon-absorption process in the case of 157nm VUV laser. Experiments also show that, the 157nm laser ablation has wonderful possibilities for fabricating precision 3D micro-structures in the optical fibers.

作者: Yutang DAI Weilai LI Desheng JIANG

作者单位: Wuhan University of Technology, Key Lab of Fiber Optic Sensing Technology and Information Processing, Wuhan 430070, Hubei Province, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）