STUDY ON THE MICRO MILLING PROCESS OF THE INERTIAL MEMS COMPONENTS

摘要：

Micro milling technology is used in the manufacturing of the inertial MEMS components with 3D micro structures. Firstly, a 3-axis micro milling machine was developed. The positioning accuracy of all the 3 axis is better than ±0.25 μm and the highest spindle speed is 160,000RPM. Then, using this machine, the optimal cutting parameters are studied and the components are successfully manufactured.Finally, to ensure the stable performance of thecomponents, laser cofocus microscope and a new method called micro-bridge method is introduced to estimate the roughness, elastic modulus and residual stress of the micro milled thin-walled structures in the inertial MEMS components and this is a good try to evaluate the surface quality produced by micro milled method.

关键词： micro milling inertial MEMS elastic modulus residual stress

作者: Bo Wang Yan Zhao Ying Chun Liang

作者单位: Center for Precision Engineering, Harbin Institute of Technology,Harbin, China

会议类型: 国际会议

会议名称: 2007年微纳系统集成及其商业化应用国际学术会议(2007 International Conference & Exhibition on Integration and Commercialization of Micro and Nano-Systems)

会议地点: 海南三亚

会议语种:英文

在线出版日期: 2007-01-10（万方平台首次上网日期，不代表论文的发表时间）