PRECISION MOTION CONTROL OF LINEAR MOTOR DRIVE SYSTEMS FOR MICRO/NANO-POSITIONING
Micro and Nano-technologies need precision machines that can produce motion accuracy down to micro/nano-meter range. At the same time, these machines have to operate at high speeds to yield high productivity. Such an increasingly tight control performance requirement puts a significant challenge to control community and forces control engineers to look beyond tradi- tionallinear control theory for more advanced nonlinear con-trollers.This research is to present an advanced nonlinear adap-tiverobust control approach to achieve micro/nanometer level positioning accuracy for micro/nano-manipulation type applica-tions.In addition, the proposed control strategy is implemented on a commercial linear motor drive system with a position mea-surementresolution of 20 nanometers by an external laser in-terferometer. Experimental results for both long-range highspeed/high-acceleration motions and short-range slow motions are presented to demonstrate the precision motion that can be achieved by the proposed method and various practical issues that remain to be solved. It is found that for motions with a maximum speed of 2 m=sec and maximum acceleration of 45 m=sec2, the steady state position tracking error is within the linear encoder resolution of 0.5 μm when the system comes to a stop and within 5 μm during the 2 m=sec constant speed period. Furthermore, the maximal position tracking during the entire motion is mostly within 20μm. For slow motions with a maximal speed of only 0:0002m=sec, the steady state position tracking error with the external laser interferometer position measurement is mostly within 0.1 μm when the system comes to a stop and within 0.2 μm during the constant low speed period, and the maximal position tracking during the entire motion is within 2μm.
Bin Yao Yun Hong Chuxiong Hu Qingfeng Wang
Kuang-piu Professor The State Key Laboratory of Fluid Power Transmission and Control Zhejiang Univer School of Mechanical Engineering Purdue University, West Lafayette, IN 47907 SKoFPTC Zhejiang University, Hangzhou, 310027, China The State Key Laboratory of Fluid Power Transmission and Control Zhejiang University, Hangzhou, 3100
国际会议
海南三亚
英文
2007-01-10（万方平台首次上网日期，不代表论文的发表时间）